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Abstract We present machine‐learning interatomic potentials (MLIPs) for simulations of Si–C–O–H compounds. The MLIPs are constructed from moment tensor potentials (MTPs) and were trained to a library of configurations that included polysiloxane structures, hypothetical crystalline and amorphous SiCOH structures, and trajectories of Si–C–O–H systems obtained via ab initio molecular dynamic (aiMD) simulations at elevated temperatures. Passive, active, and hybrid learning strategies were implemented to develop the MLIPs. The MLIPs reproduce vibrational properties of polymers and SiCOH structures obtained from aiMD simulations, thus providing a tool to identify chemical units and distinct structural characteristics through their vibrational properties. Simulations of the polymer‐to‐ceramic transformation show the development of mixed tetrahedra in SiCO ceramics and align with experimental observations. Million‐atom simulations for several nanoseconds highlight the precipitation of graphitic nanosheets from a carbon‐rich SiCO precursor. Atomistic simulations with the MLIPs deliver details of chemical reaction mechanisms during the pyrolysis of polysiloxanes, including methane abstraction and Kumada‐like rearrangements that transform the siloxane backbone. While the MLIPs still leave room for systematic improvement, they deliver simulations with “density functional theory (DFT)‐like” quality at low and high temperatures.more » « less
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